Development and application of CVD diamond micro tools for milling and grinding

Results are presented of the development of microtools for milling, drilling and grinding with diameters below 1,000 µm. Workpiece materials are silicon, aluminumoxide and glass. The tools are made from cemented carbide. For the machining of the hard and brittle materials silicon, ceramic and glass, the tools were coated with diamond. A hot-filament CVD process was used, coating the tools with a film of polycrystalline diamond with a thickness of several microns. Pre-treatment methods and process parameters for adherent diamond films on microtools were developed