Vakuumbeschichtungsanlage mit einer Beschichtungskammer und zumindest einer Quellenkammer

Vacuum coating installation includes a coating chamber (1) which can be put under vacuum and accommodates a substrate (13) to be coated, and at least one source chamber (3, 3') which is connected to the coating chamber, and houses a source in the form of a cathode (4) for the source material. The coating chamber is vacuum-tight separable from the source chambers which can be put under vacuum. USE - For substrate coating. ADVANTAGE - Drawbacks (contamination of the coating material, low coating uniformity in the case of larger substrates, poor utilisation of the cathode material) of known installations are eliminated