Optisches Element mit transparenter, kratzfester Beschichtung, Verfahren und Vorrichtung zu seiner Herstellung sowie dessen Verwendung

DE 19838826 A UPAB: 20000516 NOVELTY - An optical component, with a transparent scratch-resistant coating comprising an interference layer system of adhesion promoting and diamond-like carbon layers, is new. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (i) a process for producing the above optical component; and (ii) an apparatus for producing the above optical component. Preferred Features: The substrate consists of or is coated with pure Cu, Al, Ag or Au or consists of ZnS, Ge, ZnSe, NaCl, KCl, KBr, CaF2, Al2O3 or MgF2. The adhesion promoting layer consists of Al and/or Al2O3 or of Si, Mo, Ni, W, Zr, Ti, Mg, Hf, Ta, Be, Th or compounds. USE - As a laser mirror or as a window or a focussing or de-focussing optic (claimed), e.g. a copper mirror used for CO2 laser beam shaping, deflecting and focusing. ADVANTAGE - Coating has good adhesion and high surface hardness, is applied without significant substrate heating and can have a reflectivity identical to that of a pure copper surface