Sensoranordnung und Verfahren zur Herstellung

DE 19914728 A UPAB: 20000811 NOVELTY - A sensor structure, comprising a cavity of cross-sectional contour including inwardly offset line sections (5a-d) in the regions of transducer elements, is new. DETAILED DESCRIPTION - A sensor structure comprises a substrate consisting of one or more first layers bonded to a second layer, a cavity formed by the structured substrate and/or second layer and one or more transducer elements located on or in the second layer for detecting bending or mechanical stress of the second layer. The cross-sectional contour of the cavity is formed by one or more spaced-apart first line sections (5a-d) which do not contact the outer contour envelope and which are connected by one or more second line sections (6a-d) to form a continuous line, the or each transducer element being located in the region of a first line section. An INDEPENDENT CLAIM is also included for production of the above sensor structure. USE - For measuring pressure, flow, force or pressure-dependent parameters, e.g. in automobile, measurement and control, medical and machine applications. ADVANTAGE - The sensor properties can be adapted to various requirements, e.g. increased sensitivity, in a simple manner by suitable choice of the cavity contour below the sensor membrane without complete alteration of the production process