Add to ORKGWe discuss principles of light scattering measurements: angle resolved scattering (ARS), total scattering (TS) measurements, with special emphasize on the latter and on the DUV/VUV spectral region. The present stage and future requirements of standard procedure ISO 13696 are considered. Examples of measurements on substrates and thin film coatings are presented and related to roughness effects
A system is presented that measures total and angle resolved light scattering, reflectance and trans...
Light scattering from interface imperfections or defects is a topic of persistent interest. On the o...
Light scattering caused by imperfections of optical components can critically affect the performance...
An instrumentation for total and angle resolved scattering at 193 nm and 157 nm has been developed a...
Driven by the ever increasing requirements for optical surfaces, components and systems light increa...
In every advanced optical system, light scattering caused by the imperfections of optical components...
Ever-increasing surface quality requirements call for advanced, highly sensitive as well as nonconta...
The measurement of light scattering from optical components has received increased attention in the ...
Driven by the increasing requirements for optical surfaces, components and systems, scattering techn...
The rapid developments in optical technologies generate increasingly higher and sometimes completely...
Light scattering techniques allow a comprehensive characterization of surfaces and thin film coating...
The recent developments in semiconductor lithography place challenging demands on optical components...
International audienceDue to the diversity and complexity of optical functions they address, optical...
We have developed a system that measures total and angle resolved light scattering, reflectance and ...
Light scattering is one of the loss mechanisms of optical components. It is caused by intrinsic and ...
A system is presented that measures total and angle resolved light scattering, reflectance and trans...
Light scattering from interface imperfections or defects is a topic of persistent interest. On the o...
Light scattering caused by imperfections of optical components can critically affect the performance...
An instrumentation for total and angle resolved scattering at 193 nm and 157 nm has been developed a...
Driven by the ever increasing requirements for optical surfaces, components and systems light increa...
In every advanced optical system, light scattering caused by the imperfections of optical components...
Ever-increasing surface quality requirements call for advanced, highly sensitive as well as nonconta...
The measurement of light scattering from optical components has received increased attention in the ...
Driven by the increasing requirements for optical surfaces, components and systems, scattering techn...
The rapid developments in optical technologies generate increasingly higher and sometimes completely...
Light scattering techniques allow a comprehensive characterization of surfaces and thin film coating...
The recent developments in semiconductor lithography place challenging demands on optical components...
International audienceDue to the diversity and complexity of optical functions they address, optical...
We have developed a system that measures total and angle resolved light scattering, reflectance and ...
Light scattering is one of the loss mechanisms of optical components. It is caused by intrinsic and ...
A system is presented that measures total and angle resolved light scattering, reflectance and trans...
Light scattering from interface imperfections or defects is a topic of persistent interest. On the o...
Light scattering caused by imperfections of optical components can critically affect the performance...