Piezoelektrisch betaetigtes Mikroventil

The microvalve has a structured chip defining a valve seat (87) with a flow opening (88) at its centre, secured to a valve plate (92) around its peripheral edge, with perpendicular displacement of the valve plate relative to the valve seat under control of a piezoelectric drive. The piezoelectric drive exhibits an extension in the longitudinal direction in response to an applied electrical voltage, for flexure of the elastic mounting zone between the valve seat and the peripheral edge of the structured chip for providing the perpendicular displacement. USE - For automobile applications. ADVANTAGE - Reduced overall size and low operating force