Electrically controlled metal oxide gas sensor designed with PROSA-CHEM

Scheinert, M.
Doll, T.
Wöllenstein, J.
Dalin, J.
Frerichs, H.P.
Verhoeven, H.
Lehmann, M.

Publication date

January 2002

DOI

10.1109/ICSENS.2002.1037116

Abstract

In this paper, an electrically controlled metal oxide gas sensor designed with PROSA-CHEM is introduced, specified and realized. The simulator PROSA-CHEM is explained and its function is verified by using realistic sensor data. On the practical side, a first device was fabricated and first measurements were done and compared with the simulation. It is found that the gas sensitivity and selectivity of the sensor can be altered by electric fields

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Electrically controlled metal oxide gas sensor designed with PROSA-CHEM

Abstract

Extracted data

Electrically controlled metal oxide gas sensor designed with PROSA-CHEM

Abstract

Extracted data

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