This paper describes the development and characterization of CMOS compatible surface micromachined capacitive differential pressure sensors with monolithic integrated electronics. Results from on-chip linearization, temperature compensation and investigation of humidity influence are presented
A MEMS (Micro-Electro-Mechanical System) option for pressure sensors has been integrated into the Fr...
This article focuses on a proposed Switched-Capacitor Dual-Slope based CDC. Special attention is pai...
A capacitive differential pressure sensor has been developed. The process used for the fabrication o...
In the early phase of MEMS development piezoresistive pressure transducers were dominating due to th...
This paper introduces a noval familiy of monolithic integrated surface micromachined pressure sensor...
This paper introduces a noval family of monolithic integrated surface micromachined pressure sensors...
This paper introduces a novel family of monolithic integrated surface micromachined pressure sensors...
A capacitive pressure sensor with CMOS switched-capacitor circuitry for on-chip signal conditioning ...
In this paper a single chip pressure and temperature sensor system with on chip electronics is prese...
A capacitive pressure sensor with CMOS switched-capacitor circuitry for on-chip signal conditioning ...
The fabrication of capacitive pressure sensors using silicon integrated circuit processing is descri...
Abstract In this paper, we presents a MEMS pressure sensor integrated with a readout ...
The fabrication of capacitive pressure sensors using silicon integrated circuit processing is descri...
A capacitive micropressure sensor with readout circuits on a single chip is fabricated using commerc...
An ultra-high sensitivity surface-micromachined capacitive differential pressure sensor and capacita...
A MEMS (Micro-Electro-Mechanical System) option for pressure sensors has been integrated into the Fr...
This article focuses on a proposed Switched-Capacitor Dual-Slope based CDC. Special attention is pai...
A capacitive differential pressure sensor has been developed. The process used for the fabrication o...
In the early phase of MEMS development piezoresistive pressure transducers were dominating due to th...
This paper introduces a noval familiy of monolithic integrated surface micromachined pressure sensor...
This paper introduces a noval family of monolithic integrated surface micromachined pressure sensors...
This paper introduces a novel family of monolithic integrated surface micromachined pressure sensors...
A capacitive pressure sensor with CMOS switched-capacitor circuitry for on-chip signal conditioning ...
In this paper a single chip pressure and temperature sensor system with on chip electronics is prese...
A capacitive pressure sensor with CMOS switched-capacitor circuitry for on-chip signal conditioning ...
The fabrication of capacitive pressure sensors using silicon integrated circuit processing is descri...
Abstract In this paper, we presents a MEMS pressure sensor integrated with a readout ...
The fabrication of capacitive pressure sensors using silicon integrated circuit processing is descri...
A capacitive micropressure sensor with readout circuits on a single chip is fabricated using commerc...
An ultra-high sensitivity surface-micromachined capacitive differential pressure sensor and capacita...
A MEMS (Micro-Electro-Mechanical System) option for pressure sensors has been integrated into the Fr...
This article focuses on a proposed Switched-Capacitor Dual-Slope based CDC. Special attention is pai...
A capacitive differential pressure sensor has been developed. The process used for the fabrication o...
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