Verfahren zur Herstellung eines kontrolliert deformierbaren Funktionselementes sowie Funktionselement

DE 10135962 C UPAB: 20030716 NOVELTY - Production of a controlled deformable functional element (1) comprises applying an actuator (4) on an exposed metallic material surface (3) of a metallic substrate (2); and surrounding the actuator apart from the contact connections with a metallic material in a metal deposition process. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for the controlled deformable functional element produced. Preferred Features: A metallic layer free from inner mechanical stresses is formed on the metallic substrate. A number of actuators are evenly distributed on the exposed metallic material surface. A PVD or CVD process is used as the metal deposition process. USE - Used as an optical element or valve element (claimed). ADVANTAGE - No weak points are produced between the actuator and the functional element