Thermoelektrische Gas- und Stroemungssensoren

DE 10212167 A UPAB: 20031125 NOVELTY - A gas and/or flow sensor comprises thermocouples (6, 7) with n-conducting and p-conducting doped sections (8, 9, 12, 13) arranged on a substrate (1), and contacts (2) for the voltage. The doped sections are made from at least one thermoelectric oxide. At least one section is gas-sensitive and the thermocouples have a temperature gradient produced via a heating element and have a thermo-voltage. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for the quantitative determination of gases using the above sensor. Preferred Features: At least one section is gas-sensitive in several defined regions separated from each other. At least one thermocouple is made from a gas-sensitive material with a layer of gas-insensitive material or is made from a gas-insensitive material with a layer of gas-sensitive material. The thermoelectric oxide is made from SnC2, Co3O4, NiO, WO3, V2O5, Ga2O3, Cr2-xTixO3, NaCo2O4, CaCoO3, Skutterudite, semiconducting silicide and semiconductor alloys. USE - Used for determining gases e.g. in gas mixtures, for measuring the flow of gases and fluids, and in production and process measurement technology, e.g. in the automobile industry, in security technology and in environmental technology (claimed). ADVANTAGE - The sensor has reduced cross-sensitivity