Bauelement mit ultrapraeziser Oberflaeche und Verfahren zu seiner Herstellung

DE 10134157 A UPAB: 20030505 NOVELTY - Process for coating substrate having an ultra-precise surface comprises applying an optical layer system and voltage compensation layer made from aluminum oxide without ion support DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a component having an ultra-precise surface coated with an optical layer system and a voltage compensation layer made from aluminum oxide without ion support. Preferred Features: The optical layer system is made from SiO2 and/or TiO2 layers applied by PVD. USE - Used for coating a substrate having an ultra-precise surface. ADVANTAGE - The layers have high stability