Vorrichtung und Verfahren zum Messen und zur Bestimmung von Ladungstraegerstroemen und davon ableitbaren Groessen in ionen- und plasmagestuetzten Prozessen

DE 10258118 A UPAB: 20040805 NOVELTY - Device for measuring and determining charge carrier streams and parameters derived from them in ion- and plasma-supported processes comprises a sensor formed as a Faraday collector connected to an evaluation and control device. DETAILED DESCRIPTION - Device for measuring and determining of charge carrier streams and parameters derived from them in ion- and plasma-supported processes comprises a sensor formed as a Faraday collector connected to an evaluation and control device. The sensor has a measuring electrode and a grid (13, 14, 15) arranged in front of the electrode to control the charge carrier on the electrode. The grid and the measuring electrode are joined together in the form of a stack via spacer elements (16) as a measuring insert unit which is received in a housing (19) made from a vacuum-compatible material open on the front side. INDEPENDENT CLAIMS are also included for the following: (1) sensor for measuring ion streams in ion- and plasma-supported processes; and (2) process for determining charge carrier streams and parameters derived from them. USE - Used in industrial coating devices. ADVANTAGE - The device is compact