Analysis of active micromembranes with nanometer resolution

The paper describes methodology, instrumentation, and experiments for the study of the mechanical behaviour of MEMS, especially active micromembranes. The technique of speckle interferometry is extended to high microscopic magnification and short wavelength of laser light. Micromembrane arrays different in size and shape were analysed with respect to plezo response, resonance, and cross-talk. Challenging issues for the optical measurement are the micrometer lateral size of the details, the nanometer deflection, and the Megahertz frequencies of resonant vibrations