Procedures to reduce reflection on polymer surfaces

Antireflection (AR) properties are required for optical surfaces to avoid disturbing reflections as well as to improve the transmission of optical systems. The common method to reduce the reflection on optics is vacuum deposition of interference coatings. However, special efforts are required for each type of plastic to develop polymer-capable vacuum coating processes due to the manifold chemical and physical properties of optical polymers. An alternative procedure for the antireflection of polymers is the generation of surface structures that decrease the index of refraction in a surface region. In this paper, the suitability of the miscellaneous thermoplastic polymers for plasma-ion assisted deposition processes is evaluated. This comprises the study of damage effects caused by the contact with plasma and high-energy radiation as well as the development of special coating designs and of suitable process conditions. Coating properties achieved are discussed for PMMA and poly-cycloolefines. The same ion source arrangement as used for coating has been applied for etching an antireflective sub-wavelength surface structure into PMMA. In summary, the paper shows the practical application fields for both technologies