Add to ORKGThis paper deals with vacuum UV optical coatings for micro mirror applications. High reflecting low-stress optical coatings have been developed for the next-generation of micro mechanical mirrors. The optimized metal systems are applicable in the VUV spectral region and can be integrated in the technology of MOEMS, such as spatial light modulators (SLM) and micro scanning mirrors
In contrast to vacuum ultraviolet (VUV) and deep ultraviolet (DUV) light used for current lithograph...
Abstract: Extreme ultraviolet lithography (EUVL) is widely seen as a key technology for future semic...
The development of microelectronics is always driven by reducing transistor size and increasing inte...
High reflecting low-stress optical coatings for the next-generation of micro mechanical mirrors have...
This paper addresses different highly reflective optical coatings on micro scanning mirrors (MSM) fo...
High-performance coatings for micromechanical mirrors were developed. The high-reflective metal syst...
This paper presents approaches to achieve high reflective metal mirrors from 1064 nm-the near infrar...
Coatings are the most critical parts in ultraviolet optical systems. Low-defect vacuum deposition of...
This paper addresses different highly reflective optical coatings on micro scanning mirrors (MSM) fo...
Aluminum layers protected with fluoride coatings have been deposited by evaporation and characterize...
This thesis discusses some of the challenges of optical design for Extreme Ultraviolet (EUV) mirror ...
The demand to enhance the optical resolution, to structure and observe ever smaller details, has pus...
This thesis discusses some of the challenges of optical design for Extreme Ultraviolet (EUV) mirror ...
As the world becomes more connected, smarter, and more eco-friendly, computer microchips represent b...
Multilayer mirror coatings which reflect extreme ultraviolet (EUV) radiation are a key enabling tech...
In contrast to vacuum ultraviolet (VUV) and deep ultraviolet (DUV) light used for current lithograph...
Abstract: Extreme ultraviolet lithography (EUVL) is widely seen as a key technology for future semic...
The development of microelectronics is always driven by reducing transistor size and increasing inte...
High reflecting low-stress optical coatings for the next-generation of micro mechanical mirrors have...
This paper addresses different highly reflective optical coatings on micro scanning mirrors (MSM) fo...
High-performance coatings for micromechanical mirrors were developed. The high-reflective metal syst...
This paper presents approaches to achieve high reflective metal mirrors from 1064 nm-the near infrar...
Coatings are the most critical parts in ultraviolet optical systems. Low-defect vacuum deposition of...
This paper addresses different highly reflective optical coatings on micro scanning mirrors (MSM) fo...
Aluminum layers protected with fluoride coatings have been deposited by evaporation and characterize...
This thesis discusses some of the challenges of optical design for Extreme Ultraviolet (EUV) mirror ...
The demand to enhance the optical resolution, to structure and observe ever smaller details, has pus...
This thesis discusses some of the challenges of optical design for Extreme Ultraviolet (EUV) mirror ...
As the world becomes more connected, smarter, and more eco-friendly, computer microchips represent b...
Multilayer mirror coatings which reflect extreme ultraviolet (EUV) radiation are a key enabling tech...
In contrast to vacuum ultraviolet (VUV) and deep ultraviolet (DUV) light used for current lithograph...
Abstract: Extreme ultraviolet lithography (EUVL) is widely seen as a key technology for future semic...
The development of microelectronics is always driven by reducing transistor size and increasing inte...