Preparation and characterization of multifunctional thin film sensors based on amorphous diamond-like-carbon

Lüthje, H.
Biehl, S.
Bandorf, R.
Sick, J.-H.
Peiner, E.
Tibrewala, A.

Publication date

January 2005

Abstract

Amorphous carbon thin films also named diamond-like-carbon (DLC) are well known for their hardness, wear resistant and low friction behavior in tribological contacts. This paper deals with an additional aspect of this material, namely piezoresisivity of DLV films, which makes DLC based coatings to novel multifunctional surfaces with superior sensoric properties. DLC was prepared at low temperatures (<150°C) with piezo K-factors of some 100 to 1200. We will show, that this excellent coating can be prepared with optimum properties for force/pressure transducer and tribological coating as well. This allows direct measurements at mechanically treated surfaces

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Preparation and characterization of multifunctional thin film sensors based on amorphous diamond-like-carbon

Abstract

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Preparation and characterization of multifunctional thin film sensors based on amorphous diamond-like-carbon

Abstract

Extracted data

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