Reinraumtaugliche Werkstoffe: Test- und Klassifizierungsverfahren

To support the industry in the construction of equipment for contamination sensitive micromechanical systems, there is a need for cleanroom-suitable materials. To date there are no lists of materials available worldwide. As a result, equipment manufacturers are forced to select cleanroom- suitable materials purely from a visual point of view which have not been scientifically proven. This gap shall be closed by standardized tests methods for evaluating the cleanroom suitability of materials