High resolution acoustical methods: Micro- and nano-materials applications

Characterization of defects with micro- and nanometer sizes, local variations in materials properties, and localized strains and deformations are critical for predicting the reliability of layer systems, microelectronic devices, MEMS and nano-structured material systems. Microscopic nondestructive evaluation methods are capable of detecting near surface defects of nanometer size. Local material property variations can be measured with nanometer resolution. Localized material degradation can be studied. This paper will discuss high resolution acoustic imaging techniques and the potential to solve the above tasks