Untersuchungen der Haftung zwischen Werkzeug und Werkstück beim Heißprägen von Mikrostrukturen

Miniaturized, coast-efficient precision mechanical construction units and functional structures of the Micro System Technologies can be produced by the help of the micro hot embossing in high-tensile metallic materials and inorganic glasses. Process-safe demould between the tool and the work piece is prevented by partly appearing adherence effects. The principles of the adherence mechanisms are presented and showed by examples. The demoulding was analyzed during the hot shaping process of titanium by common tool coatings, layers with barrier characteristics, coats as realizing agent and lubricant as well as a special ceramic material. In addition, the embossing of Pyrex was realized with coated, wet and dry etched silicon tools, whereby weak points are revealed, which contribute to the adherence effect and partly to the outbreak of the tool. Further, a program for the process-safe demould for glasses was developed. As a basis for the glass embossing-attempts, a bond procedure was developed additionally, which connects the necessary Si-tools on ceramic substrates