Combination of analytical models and order reduction methods for system level modeling of gyroscopes

Within the design process of complex sensor systems different physical effects and electronic circuits for signal processing have to be analyzed. A simulation of the entire system including models for micromechanics and field effects based on partial differential equations is often impossible or too expensive concerning computing time. Furthermore, many details of component behavior calculated by Finite Element Method (FEM) are not needed at system level. In this paper we describe an approach for system level simulation of sensor systems and its application to a gyro sensor system