Ion sources are used in vacuum thin film technology in various types and for numerous applications. This article provides an overview of basic features of ion sources and of the present status of ion source technology. This includes an explanation of the main parameters of such sources, typical set-up and applications, as well as power supply components
The first edition of this title has become a well-known reference book on ion sources. The field is ...
Vacuum arc ion sources provide a convenient tool for the production of intense beams of metal ions. ...
In this chapter, the anatomy of an ion source is briefly described, as well as a few features of par...
The vacuum arc ion source has evolved over the past twenty years into a standard laboratory tool for...
The basic notions of vacuum technology for ion sources are presented, with emphasis on pressure prof...
This article reviews the development of ion sources for materials processing and the progress of com...
It is well known that IAD (ion assisted deposition) using a plasma source improves the optical and p...
This series of lectures starts with an introduction in some aspects of atomic and plasma physics as ...
This article describes a vacuum ion deposition , which is characterized, mainly, by bombarded partic...
This series of lectures starts with an introduction in some aspects of atomic and plasma physics as ...
In the thesis the development of two equipment for preparation of ultrathin films under ultrahign va...
Ion sources are a critical component of all particle accelerators. They create the initial beam that...
Ion sources are required for a variety of lab experiments we use in our modern world. Machines perfo...
Ion sources are a critical component of all particle accelerators. They create the initial beam that...
Particular emphasis is placed on the technology of plasma discharge ion sources which utilize solid ...
The first edition of this title has become a well-known reference book on ion sources. The field is ...
Vacuum arc ion sources provide a convenient tool for the production of intense beams of metal ions. ...
In this chapter, the anatomy of an ion source is briefly described, as well as a few features of par...
The vacuum arc ion source has evolved over the past twenty years into a standard laboratory tool for...
The basic notions of vacuum technology for ion sources are presented, with emphasis on pressure prof...
This article reviews the development of ion sources for materials processing and the progress of com...
It is well known that IAD (ion assisted deposition) using a plasma source improves the optical and p...
This series of lectures starts with an introduction in some aspects of atomic and plasma physics as ...
This article describes a vacuum ion deposition , which is characterized, mainly, by bombarded partic...
This series of lectures starts with an introduction in some aspects of atomic and plasma physics as ...
In the thesis the development of two equipment for preparation of ultrathin films under ultrahign va...
Ion sources are a critical component of all particle accelerators. They create the initial beam that...
Ion sources are required for a variety of lab experiments we use in our modern world. Machines perfo...
Ion sources are a critical component of all particle accelerators. They create the initial beam that...
Particular emphasis is placed on the technology of plasma discharge ion sources which utilize solid ...
The first edition of this title has become a well-known reference book on ion sources. The field is ...
Vacuum arc ion sources provide a convenient tool for the production of intense beams of metal ions. ...
In this chapter, the anatomy of an ion source is briefly described, as well as a few features of par...
DOI
Add to ORKG