High-performance coatings for micromechanical mirrors
- Gatto, A.
- Yang, M.
- Kaiser, N.
- Schmidt, J.U.
- Sandner, T.
- Schenk, H.
- Lakner, H.
- Heber, J.
DOIAbstract
High-performance coatings for micromechanical mirrors were developed. The high-reflective metal systems can be integrated into the technology of MOEMS, such as spatial light modulators and microscanning mirrors from the near-infrared down to the vacuum-ultraviolet spectral regions. The reported metal designs permit high optical performances to be merged with suitable mechanical properties and fitting complementary metal-oxide semiconductor compatibility
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