Verfahren zur Erfassung von lokalen Eigenspannungen in Festkoerperobjekten mit einer Ionenstrahltechnik

DE 102005008281 A1 UPAB: 20061005 NOVELTY - The method involves local material manipulation on the body which leads to redistribution of stress or expansion behavior. A recording of the surface area of the body treated is made before and after the manipulation. A comparison of the recordings is used to determine deformation fields caused by residual stress. The local residual stress can be derived from these fields. The manipulation is carried out with an ion beam (12) which generates a structure with dimensions in the micro or nanometer range in or on the body. The recordings are microscopic recordings. USE - In manufacturing microelectronic or micromechanical components. ADVANTAGE - Can be easily used in the micro and nanometer ranges