Active and passive tool alignment in ultraprecision machining for the manufacturing of highly precise structures

These days technology of ultraprecision machining enables the maufacturing of high-precision structures. In order to comply with the narrow form tolerances which are demanded in ultraprecision technology, the relative alignment between the tool and the work piece is decisive. Therefore active and passive alignment techniques have been combined to position the tool with highest accuracy. An optical device detects the tools offset from the origin which is then compensated with in a submicrometer range by the control system of the machine tool. Futhermore, this device is used to inspect the condition of the cutting edge. By using an automated tool changer a defective tool can be replaced or tools with different shapes can be exchanged. The combination of the active and passive alignment techniques described in this paper increases the process stabilitiy of ultraprecision machining and enables the manufacturing of complex structures with submicrometer tolerances. The active and passive tool alignment is used for the manufacturing of high-precision micro structures which are presented in this paper