Mikromechanische Gehäusung mit mindestens zwei Kavitäten mit unterschiedlichem Innendruck und/oder unterschiedlicher Gaszusammensetzung sowie Verfahren zu deren Herstellung

WO 2007113325 A1 UPAB: 20071121 NOVELTY - The multiple-component has a flat substrate and a flat cap structure connected with each other in such a manner that the flat substrate and the flat cap structure surround two cavities (5, 6) for respective component parts e.g. chips, where the cavities are sealed against each other and towards an outer environment. The cavity (5) is provided with getter material (8), where the cavity (5) exhibits a different internal pressure and/or a different gas composition from the cavity (6) due to the getter material. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (1) a flat substrate and a flat cap structure for utilization in a multiple-component (2) a component part with a flat substrate and a flat cap structure (3) a method for manufacturing a multiple-component. USE - Used in a microsystem technology (claimed). ADVANTAGE - The cavity is provided with getter material, where the cavity with getter material exhibits different internal pressure and/or different gas composition than the other due to the getter material, thus enabling the cavities of the component parts to exhibit different internal pressure and/or different gas composition in an effective manner