Verfahren zum Ueberpruefen der Getter-Gasabsorptionskapazitaet in Kavitaeten von fuer die Mikrosystemtechnik geeigneten Mehrfachbauelementen sowie fuer dieses Verfahren benoetigte Bauteile

DE 102006042764 B3 UPAB: 20080604 NOVELTY - The wafer (1) has multiple gas absorption arrays (2) that are covered with a uniform surface (3) on a getter material and arranged in such a manner that the gas absorption arrays come to lie in a cavity that is to be formed. A getter test array (4) is arranged in such a manner that the getter test array comes to lie in the cavity, where the getter test array exhibits a small getter material surface (5) than the gas absorption array surface. Another getter test array (6) is provided, where the getter test array (6) is free of getter material. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for checking a getter gas absorption capacity of a multiplicate component. USE - Base or cover wafer for producing a cavity for a multiplicate component (claimed) that is utilized in a microsystem technology. ADVANTAGE - The getter test array is arranged in such a manner that the getter test array comes to lie in the cavity, where the getter test array exhibits the small getter material surface than the gas absorption array surface, thus permitting a direct control of the getter capacity of the multiplicate component in a sensor covering process on a wafer layer