Macromodeling based variability analysis of an inverted embedded microstrip line

A multivariate macromodel of the per unit length parameters of an inverted embedded microstrip line is built starting from a limited number of highly accurate but computationally expensive electromagnetic simulations. Besides the frequency dependency, the macromodel also encompasses the influence of a geometrical parameter that determines the shape of the cross-section of the metallic interconnect. This allows to assess the influence of the etching process through a variability analysis of the interconnect's behavior in both frequency and time domain. The analysis is carried out via a robust Monte Carlo approach, which has been made computationally feasible thanks to the macromodeling step.A multivariate macromodel of the per unit length parameters of an inverted embedded microstrip line is built starting from a limited number of highly accurate but computationally expensive electromagnetic simulations. Besides the frequency dependency, the macromodel also encompasses the influence of a geometrical parameter that determines the shape of the cross-section of the metallic interconnect. This allows to assess the influence of the etching process through a variability analysis of the interconnect's behavior in both frequency and time domain. The analysis is carried out via a robust Monte Carlo approach, which has been made computationally feasible thanks to the macromodeling step.P