Different magnetron sputter geometries and modes for the deposition of optical coatings are presented. Examples of AR- and filter coatings are given demonstrating the high potential of this technology for different applications
Reactive magnetron sputtering was used to deposit multilayer optical coatings as well as Rugate filt...
The planar magnetron cathode was introduced in 1974. Magnetron sputtering has become the most import...
Reactive pulse magnetron sputtering of a metal target in a reactive gas atmosphere is used for depos...
Highly productive technologies for precison optics will be presented. Film properties of multi-layer...
Optical films of high density and good environmental stability can be deposited at high deposition r...
Besides classical multilayer systems with alternating low and high refractive indices, reactive puls...
The upscaling of highly productive coating technologies for precison optics and appropriate equipmen...
A turntable magnetron sputter system based on cylindrical magnetrons was used to investigate particl...
Pulse magnetron sputtering is very well suited for the deposition of optical coatings. Due to energe...
Magnetron sputtering is a very versatile plasma deposition method invented in the 1930ies by Penning...
Reactive pulse magnetron sputtering processes are of increasing interest for the deposition of high-...
A vacuum deposition system was built enabling flexible polymer sheet, wound on a roll-to-roll transp...
The upscaling of highly productive inline magnetron sputtering for precision optics and application ...
Reactive magnetron sputtering processes have gained considerable interest for the production of prec...
The deposition of high-precision optical coatings by magnetron sputtering is still a demanding and c...
Reactive magnetron sputtering was used to deposit multilayer optical coatings as well as Rugate filt...
The planar magnetron cathode was introduced in 1974. Magnetron sputtering has become the most import...
Reactive pulse magnetron sputtering of a metal target in a reactive gas atmosphere is used for depos...
Highly productive technologies for precison optics will be presented. Film properties of multi-layer...
Optical films of high density and good environmental stability can be deposited at high deposition r...
Besides classical multilayer systems with alternating low and high refractive indices, reactive puls...
The upscaling of highly productive coating technologies for precison optics and appropriate equipmen...
A turntable magnetron sputter system based on cylindrical magnetrons was used to investigate particl...
Pulse magnetron sputtering is very well suited for the deposition of optical coatings. Due to energe...
Magnetron sputtering is a very versatile plasma deposition method invented in the 1930ies by Penning...
Reactive pulse magnetron sputtering processes are of increasing interest for the deposition of high-...
A vacuum deposition system was built enabling flexible polymer sheet, wound on a roll-to-roll transp...
The upscaling of highly productive inline magnetron sputtering for precision optics and application ...
Reactive magnetron sputtering processes have gained considerable interest for the production of prec...
The deposition of high-precision optical coatings by magnetron sputtering is still a demanding and c...
Reactive magnetron sputtering was used to deposit multilayer optical coatings as well as Rugate filt...
The planar magnetron cathode was introduced in 1974. Magnetron sputtering has become the most import...
Reactive pulse magnetron sputtering of a metal target in a reactive gas atmosphere is used for depos...
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