Metrology, analysis and characterization in micro- and nanotechnologies: A European Challenge

Europe offers excellent expertise in the area of metrology, analysis and characterization in micro- and nanotechnologies. This exper-tise is borne through research institutes, academia, small/medium enterprises and industry. The European approach to develop syner-gies, enhance the existing technologies and to develop innovative methods is displayed by two projects named Analytical Network for Nanotech (ANNA) and Semiconductor Equipment Assessment for NanoElectronic Technologies (SEA-NET). ANNA is an infra-structure initiative focusing on the integration of independently op-erating laboratories. This multi-site laboratory forms a collabora-tive, synergistic network of analytical working scientists and pre-existing institutions. The objective of SEA-NET is to validate emerging semiconductor manufacturing equipment including me-trology tools for advanced process requirements for the next tech-nology nodes. The prototype equipment assessment is done in co-operation of tool suppliers with integrated device manufacturers and research institutes. Results of non-contact resistivity measure-ments, x-ray metrology platform and a gas detection system based on IMS technology are presented