Mikrosystem und Verfahren zum Herstellen eines Mikrosystems

DE 102007034888 B3 UPAB: 20090212 NOVELTY - The microsystem has a micromirror actuator for pivoting a micromirror (1) around an axis from a resting position. A transparent cover (3) is arranged on a frame chip having a chip frame (10) at which the mirror is resiliently pivotable. The micromirror is arranged in a cavity (11) formed between the cover and a carrier chip (13). The mirror is arranged at a frame (14) around the axis. The frame is arranged in the chip frame. The frame swings-out into a chip plane defined by the chip such that the micromirror in the resting position is tilted around a discrete angle opposite to the plane. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for manufacturing a microsystem. USE - Microsystem e.g. micro-opto-electromechanical system, for use in a microscanner and projector. ADVANTAGE - The frame swings-out into a chip plane defined by the chip such that the micromirror in the resting position is tilted around a discrete angle opposite to the plane, thus diffracting radiation reflected at the cover, and hence avoiding interference effect caused by the reflection at the cover in simple manner. The microsystem is manufactured in cost-effective manner