Integrated piezo-resistive positionssensor for microscanning mirrors

Microscanning mirrors with integrated piezoresistive positionsensors are presented. The novel sensor approach is based on intrinsic piezoresistivity of SOI material. It is fully compatible to microscanner technology and requires no additional technological efforts, enabling a cost efficient fabrication process. Integrated 2D position sensors with amplitude sensitivity of Sf= 2.0mV/V @ 6°, similar to metallic strain gauges, as well as a good linearity of 0.5% error of linearity has been realized