Mikromechanischer Aktuator mit elektrostatischem Kamm-Antrieb

DE 102008059634 A1 UPAB: 20100614 NOVELTY - The actuator has a torsion-or-bending attachment (18) deflected towards a plane of an outer frame (5) in a vertical direction. Inner connecting elements comprise an U-shaped anchor structure (12) and leaf springs (13) extending parallel to an outer tipping axis. The springs are connected with each other in a region of actuator units such as micro mirror (1), torsion spring (2) and a frame (3), where the region lies closer to the outer tipping axis than at an edge of the units. The springs are formed and arranged such that the springs are bendable transverse to the vertical direction. USE - Micromechanical actuator i.e. biaxial micro mirror scanner (claimed), for a flat mobile telephone. ADVANTAGE - The actuator is designed such that it deflects the micro mirror with an edge length of 1 mm at a natural resonance of 1 kilohertz around plus or minus 7 degree. The actuator is manufactured in a simple and cost-effective manner, and provides hermetic vacuum encapsulation and low power consumption