Lumineszenzscanner sowie Verfahren zur Detektion von Lumineszenz in Halbleiterbauteilen

DE 102008052223 A1 UPAB: 20100506 NOVELTY - The scanner (1) has a single-line lighting unit for excitation of luminescence in a semiconductor device. A detector (4) i.e. indium gallium arsenide charge coupled device (CCD) camera, is provided for spatially resolved detection of luminescence emitted by a semiconductor component. An analyzing unit i.e. electronic computing unit, determines physical properties of the semiconductor component from the detected spatially resolved luminescence. A lighting unit (3a) illuminates the semiconductor device with light. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for detecting physical characteristics of a semiconductor component by a luminescence scanner. USE - Luminescence scanner for spatially resolved determination of physical characteristics of a semiconductor component. ADVANTAGE - The indium gallium arsenide charge coupled device (CCD) camera increases the spatial resolution of a picture, achieves a higher quantum efficiency and reduces the time for determining the physical characteristics of the semiconductor component. The camera has long life span