Simulation des Laserabgleichs von Dünnfilmwiderständen mit Widerstandsnetzwerk im Schaltungssimulator

Precision analogue integrated circuits benefit from stable thin film resistors. Laser trimming may be used to achieve precise absolute resistance values. Simulation of trimming is typically done by specialized numerical solvers. This paper presents a simplified simulation method using a network of resistors as lumped elements. Laser cuts are emulated by locally raising the resistance. The resistor network is evaluated after each cut by a standard circuit simulator. Total resistance, or potential, power and current distributions may be plotted. A small program generates the input file, controls thesimulator and plotting. A conceptually simple simulator results for a quick estimation of precision laser trimming