Beschichtungsanlage und Beschichtungsverfahren

DE 102009023472 A1 UPAB: 20101216 NOVELTY - The coating plant comprises an evacuatable recipient (10) for the reception of a substrate (30), a gas supply device (20, 21, 22) by which a gaseous precursor is introduced in the recipient, a cylindrical-shaped heatable protection element and an activation device (40), which consists of a heatable activation element (41), whose end is mounted on a mounting position to a holding element. The mounting position is partially assessable before introducing the gaseous precursor by the protection element. The cross-section of the protection element is polygonal or round. DETAILED DESCRIPTION - The coating plant comprises an evacuatable recipient (10) for the reception of a substrate (30), a gas supply device (20, 21, 22) by which a gaseous precursor is introduced in the recipient, a cylindrical-shaped heatable protection element and an activation device (40), which consists of a heatable activation element (41), whose end is mounted on a mounting position to a holding element. The mounting position is partially assessable before introducing the gaseous precursor by the protection element. The cross-section of the protection element is polygonal or round and a closure element is arranged on the side of the protection element turned away the holding element. The closure element comprises a discharge opening. The protection element has a separation wall, which separates the interior volume of the protection element in a first part volume and a second part volume. The protection element has a changeable cross-section along its longitudinal axis. A part of the protection element is separatably connected with the holding element. The protection element has a gas discharge opening, which is connected with a vacuum pump, and a gas supply opening, which supplies reactive gas and/or inert gas. The protection element is electrically insulated by the holding element and/or the activation element and comprises ribs on its interior side. The protection element is equipped with a sorption material, which consists of zeolite, metal foam and/or titanium film. An INDEPENDENT CLAIM is included for a method for producing a coating of a substrate. USE - Coating plant useful for coating a substrate. ADVANTAGE - The coating plant increases the process stability, simplifies the process control and ensures the coating of the substrate with good quality and with less consumption of energy