Magnetron-Beschichtungsmodul sowie Magnetron-Beschichtungsverfahren

DE 102009015737 A1 UPAB: 20101019 NOVELTY - The magnetron coating module (100) comprises a coating source (2), a rotating target as auxiliary substrate arranged between a first coating source and a magnetron (5, 6), where the rotating target forms cathode of the magnetron, and/or a gas space divider (4) arranged between the first coating source and the coating area. The surface of the rotating target consists of carbon or carbon-containing material deposited in slight mass on a substrate (1) during sputtering. The material of the carrier is a material with slight sputtering rate. The first coating source is a planar magnetron. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for the production of a substrate with a magnetron-coating module. USE - Magnetron coating module useful for the production of optical coatings for applications in optics and optoelectronics. ADVANTAGE - The magnetron coating module ensures simple and efficient production of high-quality optical coatings