Auf Waferebene herstellbarer Chip fuer Fluessigchromatographie sowie Verfahren fuer seine Herstellung

DE 102009052234 A1 UPAB: 20110524 NOVELTY - The method involves providing a planar substrate i.e. wafer, made of silicon, glass, glass ceramic material or ceramic material. A channel structure is etched into the planar substrate. Non-porous precursor material e.g. gold, aluminum, silicate glass, silicon oxide and aluminum oxide. for the porous stationary phase is introduced into a part of the channel structure. A porous three-dimensional network is formed from the precursor material. The channel structure is covered on an upper side of the planar substrate in a liquid-tight manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a chip with a miniaturized separation column comprising recesses and covers. USE - Method for producing a miniaturized separation column of a chip (all claimed) for on-chip high-pressure liquid chromatography purposes. ADVANTAGE - The channel structure is covered on the upper side of the planar substrate in a liquid-tight manner, thus producing the miniaturized, reliable and reproducible separation column on the wafer plane in a fast manner