Compact design for high precision machine tools

Due to raising functional integration in micro fluidic, micro mechanic, micro electronic and micro optical systems the trend to scaling down the work piece sizes while increasing its complexity requires high precise machine accuracy. With respect to the process and geometrical parameters, most of the finishing manufacturing processes can be covered by milling and grinding operations with three or five machine axes. But whereas the available machine tools hardly achieve the required process dynamic and accuracy in all degrees of freedom, the requirements still increase. For this reason the Fraunhofer IPT has developed high precise machine tools following a compact design strategy by reducing the overall machine dimensions as far as conventional machine components such as measuring or drive systems were available. The developments of two compact machine tools exemplify the dynamic and accuracy enhancement by compact design and are described in the following