An efficient plasma source has been established by arranging a hot hollow cathode electron emitter in a strong axial magnetic field, allowing for a reduction of working gas flow by one order of magnitude without loss of discharge stability. Moreover, with the reduction of gas flow not only an increase of the discharge impedance was observed, but also a multiplication of ion current density together with a highly expanded volume of the plasma plume. By means of spatially resolved Langmuir probe measurements, combined with the usage of an energyresolved mass-spectrometer, plasma density profiles and energy distribution functions of electrons and ions have been measured. Generally, with an increase of the magnetic field and with the reduction ...
DE 102007061418 A1 UPAB: 20090728 NOVELTY - The method comprises reducing gas flow through a hollow ...
Experiments have been carried out on the properties of a hollow cathode as an ion-source. The measur...
Development of coating deposition technologies, in terms of performance and costs, is an ongoing pro...
A new magnetically enhanced hollow-cathode based plasma source was developed in order to generate a ...
Hollow cathode arc discharges are efficient plasma sources and are applied in substrate pretreatment...
The hollow cathode will be presented as a plasma source for reactive evaporation processes. The holl...
Abstract: Measurements are presented of plasma properties near a hollow cathode made using a rapidl...
Hollow cathodes are sources of electrons used for gas ionization and beam neutralization in Hall eff...
NRL has developed a number of hollow cathodes to generate sheets of electrons culminating in a ‘Larg...
An array of novel hollow cathode plasma sources of 4 mm diameter and driven by up to 500 W of 13.56 ...
This paper deals with the characterization of an ionized physical vapor deposition (IPVD) by means o...
UnrestrictedThis research addresses several concerns of the mechanisms controlling performance and l...
Characteristics of plasmas in a magnetron ion source with a hollow mesh cathode have been studied. I...
A new type of plasma sputtering device, named the hollow cathode magnetron (HCM), has been developed...
We measured electron density and electron energy distribution function (EEDF) vertically through our...
DE 102007061418 A1 UPAB: 20090728 NOVELTY - The method comprises reducing gas flow through a hollow ...
Experiments have been carried out on the properties of a hollow cathode as an ion-source. The measur...
Development of coating deposition technologies, in terms of performance and costs, is an ongoing pro...
A new magnetically enhanced hollow-cathode based plasma source was developed in order to generate a ...
Hollow cathode arc discharges are efficient plasma sources and are applied in substrate pretreatment...
The hollow cathode will be presented as a plasma source for reactive evaporation processes. The holl...
Abstract: Measurements are presented of plasma properties near a hollow cathode made using a rapidl...
Hollow cathodes are sources of electrons used for gas ionization and beam neutralization in Hall eff...
NRL has developed a number of hollow cathodes to generate sheets of electrons culminating in a ‘Larg...
An array of novel hollow cathode plasma sources of 4 mm diameter and driven by up to 500 W of 13.56 ...
This paper deals with the characterization of an ionized physical vapor deposition (IPVD) by means o...
UnrestrictedThis research addresses several concerns of the mechanisms controlling performance and l...
Characteristics of plasmas in a magnetron ion source with a hollow mesh cathode have been studied. I...
A new type of plasma sputtering device, named the hollow cathode magnetron (HCM), has been developed...
We measured electron density and electron energy distribution function (EEDF) vertically through our...
DE 102007061418 A1 UPAB: 20090728 NOVELTY - The method comprises reducing gas flow through a hollow ...
Experiments have been carried out on the properties of a hollow cathode as an ion-source. The measur...
Development of coating deposition technologies, in terms of performance and costs, is an ongoing pro...