Terrestrial high resolution laser scanning is increasingly being used for geodetic deformation measurements of civil technical constructions, i.e. newly built tunnels. This paper deals with the error values during processing of a measured tunnel section and the final determination of the deformations of this tunnel section based on 3D laser scan point clouds.Terrestrial high resolution laser scanning is increasingly being used for geodetic deformation measurements of civil technical constructions, i.e. newly built tunnels. This paper deals with the error values during processing of a measured tunnel section and the final determination of the deformations of this tunnel section based on 3D laser scan point clouds.A