Hohlkathoden-Plasmaquelle sowie Verwendung der Hohlkathoden-Plasmaquelle

The source has a hollow cathode (1) comprising an active surface (2) and a passive surface (3) that are utilized for generation of plasma (5). The hollow cathode is provided with a shield, which comprises an insulator material layer (6) that is made of glass, ceramics, mica, hard paper, hard fabrics, powder-type particle, granular particle and high power plastic. The shield is distanced to the passive surface in a boundary area under formation of a boundary gap (7), where the boundary area is adjacent to the active surface. An anode is arranged on the insulator material layer