Mikrofluidikmodul und Verfahren zur Herstellung desselben

Microfluidic module for analysis of fluids, comprises: an integral carrier substrate (101) with a first main surface (103) and a second main surface (105) lying opposite to the first main surface; a sensor arrangement (107), where a first functional element (109) of the sensor arrangement is arranged at a first surface region of the carrier substrate; and a channel structure, which is coupled to the first main surface of the carrier substrate so that a channel region is formed between the first surface region of the carrier substrate and a second surface region of the carrier substrate. Microfluidic module for analysis of fluids, comprises: an integral carrier substrate (101) with a first main surface (103) and a second main surface (105) lying opposite to the first main surface; a sensor arrangement (107), where a first functional element (109) of the sensor arrangement is arranged at a first surface region of the carrier substrate; and a channel structure, which is coupled to the first main surface of the carrier substrate so that a channel region is formed between the first surface region of the carrier substrate and a second surface region of the carrier substrate lying opposite to the first surface region, and the channel region is surrounded by the channel structure and the carrier substrate. An independent claim is also included for producing the microfluidic module, comprising providing the integral carrier substrate with the first main surface and the second main surface lying opposite to the first main surface, providing the channel structure, and connecting the channel structure with the first main surface of the carrier substrate so that the channel region is formed between the first surface region of the carrier substrate and the second surface region of the carrier substrate lying opposite to the first surface region