Verfahren und Vorrichtung zur Herstellung von Deckelektroden auf organischen elektonischen Elementen

The invention relates to a process and an apparatus for producing covering electrodes on organic electronic elements. It is an object of the invention to provide possible ways of producing covering electrodes on organic electronic elements, by means of which these covering electrodes can be formed with a constant layer thickness and at a reproducible and increased coating rate while avoiding defects or influencing of organic layer components. According to the invention, semifinished parts for organic electronic elements without covering electrodes are arranged at a distance from at least two targets made of the covering electrode material in a vacuum chamber. The semifinished parts and the targets with in each case a magnetron sputtering source are moved relative to one another by means of a transport device. The magnetron sputtering sources with the targets are alternately supplied with an electric potential and a plasma by means of whose free charge carriers the covering electrodes are formed on the semifinished parts is generated between the targets