Most of the common metal fluorides were deposited by plasma-assisted electron beam evaporation. Coatings with high packing density and low extinction coefficient could be produced. The advantages in comparison to conventional deposition techniques are discussed
In the beginning, EB-PVD (electron beam physical vapour deposition) of aluminium on strip steel was ...
Metal plasmas play a special role in the formation of coatings because metal ions are condensable (f...
The paper presents a new plasma-activated PVD process - the so-called "Rod Cathode Arc Activated Dep...
ArF lithography technology requires minimization of optical losses due to scattering and absorption....
We realized metal fluoride coatings with a high packing density and a low extinction coefficient by ...
Low cost coating on metallic sheets and strips can be achieved by Physical vapour Deposition only if...
Vacuum processing enables very precise thin-layer coating of surfaces with many different materials,...
PVD coatings deposited by electron beam (EB) evaporation onto large area sub-strates like metal stri...
PVD coatings deposited by electron beam (EB) evaporation onto large area substrates like metal sheet...
High-rate electron beam deposition is one of the most effective PVD technologies. The very high prod...
EB PVD coatings on large metal sheets and metal strips are discussed and used since many years. Rece...
Electron Beam High-rate Deposition with axial guns (EBHD) offers the highest coating rates of PVD te...
A great variety of coating materials can be obtained by methods of physical vapor deposition (PVD). ...
A new technique for the fabrication of optical interference layers is being introduced. MgF2, and Nd...
PVD-coatings on metal strips are discussed and used since many years. Recently developed technologie...
In the beginning, EB-PVD (electron beam physical vapour deposition) of aluminium on strip steel was ...
Metal plasmas play a special role in the formation of coatings because metal ions are condensable (f...
The paper presents a new plasma-activated PVD process - the so-called "Rod Cathode Arc Activated Dep...
ArF lithography technology requires minimization of optical losses due to scattering and absorption....
We realized metal fluoride coatings with a high packing density and a low extinction coefficient by ...
Low cost coating on metallic sheets and strips can be achieved by Physical vapour Deposition only if...
Vacuum processing enables very precise thin-layer coating of surfaces with many different materials,...
PVD coatings deposited by electron beam (EB) evaporation onto large area sub-strates like metal stri...
PVD coatings deposited by electron beam (EB) evaporation onto large area substrates like metal sheet...
High-rate electron beam deposition is one of the most effective PVD technologies. The very high prod...
EB PVD coatings on large metal sheets and metal strips are discussed and used since many years. Rece...
Electron Beam High-rate Deposition with axial guns (EBHD) offers the highest coating rates of PVD te...
A great variety of coating materials can be obtained by methods of physical vapor deposition (PVD). ...
A new technique for the fabrication of optical interference layers is being introduced. MgF2, and Nd...
PVD-coatings on metal strips are discussed and used since many years. Recently developed technologie...
In the beginning, EB-PVD (electron beam physical vapour deposition) of aluminium on strip steel was ...
Metal plasmas play a special role in the formation of coatings because metal ions are condensable (f...
The paper presents a new plasma-activated PVD process - the so-called "Rod Cathode Arc Activated Dep...
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