The concept and design of a low cost two-axes MEMS scanning mirror with an aperture size of 7 millimetres for a compact automotive LIDAR sensor is presented. Hermetic vacuum encapsulation and stacked vertical comb drives are the key features to enable a large tilt angle of 15 degrees. A tripod MEMS mirror design provides an advantageous ratio of mirror aperture and chip size and allows circular laser scanning
Scanning laser projection using resonant actuated MEMS scanning mirrors is expected to overcome the ...
Hermetic wafer level packaging of optical MEMS scanning mirrors is essential for mass-market applica...
Traditional laser scanners for 3D distance measurement involve expensive, heavy, (potentially) slow ...
Scanning laser range sensors are of increasing interest for the realization and improvement of drive...
Low cost laser scanners for environment perception are a need to facilitate ADAS integration into al...
Low-cost automotive laser scanners for environmental perception are needed to enable the integration...
Low-cost automotive laser scanners for environment perception are needed to enable the integration o...
A resonant biaxial comb-actuated 7mm-MEMS scanning mirror with tripod-suspension is developed to pro...
A higher achievable scan speed and the capability to integrate two scan axes in a very compact devic...
Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was deve...
A micro scanning mirror is an optical device used to scan laser beams which can be used for Light De...
Micro scanning mirrors are quite versatile MEMS devices for the deflection of a laser beam or a shap...
Micro scanning mirrors play an important role in various optical applications for highly miniaturize...
The MEMS (Micro-Electronical Mechanical System) scanning mirror is an optical MEMS device that can s...
MEMS-based LIDAR has the advantages of fast-scanning, simple structure, small volume, and light weig...
Scanning laser projection using resonant actuated MEMS scanning mirrors is expected to overcome the ...
Hermetic wafer level packaging of optical MEMS scanning mirrors is essential for mass-market applica...
Traditional laser scanners for 3D distance measurement involve expensive, heavy, (potentially) slow ...
Scanning laser range sensors are of increasing interest for the realization and improvement of drive...
Low cost laser scanners for environment perception are a need to facilitate ADAS integration into al...
Low-cost automotive laser scanners for environmental perception are needed to enable the integration...
Low-cost automotive laser scanners for environment perception are needed to enable the integration o...
A resonant biaxial comb-actuated 7mm-MEMS scanning mirror with tripod-suspension is developed to pro...
A higher achievable scan speed and the capability to integrate two scan axes in a very compact devic...
Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was deve...
A micro scanning mirror is an optical device used to scan laser beams which can be used for Light De...
Micro scanning mirrors are quite versatile MEMS devices for the deflection of a laser beam or a shap...
Micro scanning mirrors play an important role in various optical applications for highly miniaturize...
The MEMS (Micro-Electronical Mechanical System) scanning mirror is an optical MEMS device that can s...
MEMS-based LIDAR has the advantages of fast-scanning, simple structure, small volume, and light weig...
Scanning laser projection using resonant actuated MEMS scanning mirrors is expected to overcome the ...
Hermetic wafer level packaging of optical MEMS scanning mirrors is essential for mass-market applica...
Traditional laser scanners for 3D distance measurement involve expensive, heavy, (potentially) slow ...
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