The invention relates to a micromechanical switch (1) having a substrate (100) on which at least one first contact element (101) and at least one second contact (102) are arranged, wherein at least one of the contact elements (101, 102) can be moved, with the result that the contact elements (101, 102) can be moved from a contact position to a disconnected position, wherein the contact elements (101, 102) are at a first distance (g) from one another in the contact position and are at a second distance (G) from one another in the disconnected position, wherein the second distance (G) is greater than the first distance (g) and the first distance (g) is approximately 10 nm to approximately 200 nm
A novel latching microelectromechanical system (MEMS) switch is reported, which uses a compact confi...
The present publication discloses a micromechanical structure including at least one active element,...
The Omni-directional impact MEMS switch was designed and characterized for the purpose of impact sen...
A MEMS switch comprises a first and a second contact arrangement having a side facing each other, th...
DE 102007013102 A1 UPAB: 20081008 NOVELTY - The device has a switch part, and a cover closing the sw...
The description relates to a micromechanical manipulator comprising a substrate 1, heating elements ...
EP 1156504 A UPAB: 20020213 NOVELTY - Electrode regions (1a), a moving element (10a) and a contact p...
The invention relates to the fields of micromechanics and microelectronics and refers to a micromech...
Microminiature relay production involves depositing a fixed conductive electrode (18) on or in the s...
We report a novel multicontact radio frequency (RF) microelectromechanical system (MEMS) switch with...
International audienceThis paper presents a new way to design MEMS (microelectromechanical system) m...
We report a novel multicontact radio frequency (RF) microelectromechanical system (MEMS) switch with...
Performances of the metal-to-metal contact radio frequency (RF) MEMS switches largely rely on the co...
MEMS (Micro-Electro-Mechanical Structures) switches are devices used to achieve a short or open cir...
International audienceThis paper presents the work realized on a new RF MEMS design for micro-switch...
A novel latching microelectromechanical system (MEMS) switch is reported, which uses a compact confi...
The present publication discloses a micromechanical structure including at least one active element,...
The Omni-directional impact MEMS switch was designed and characterized for the purpose of impact sen...
A MEMS switch comprises a first and a second contact arrangement having a side facing each other, th...
DE 102007013102 A1 UPAB: 20081008 NOVELTY - The device has a switch part, and a cover closing the sw...
The description relates to a micromechanical manipulator comprising a substrate 1, heating elements ...
EP 1156504 A UPAB: 20020213 NOVELTY - Electrode regions (1a), a moving element (10a) and a contact p...
The invention relates to the fields of micromechanics and microelectronics and refers to a micromech...
Microminiature relay production involves depositing a fixed conductive electrode (18) on or in the s...
We report a novel multicontact radio frequency (RF) microelectromechanical system (MEMS) switch with...
International audienceThis paper presents a new way to design MEMS (microelectromechanical system) m...
We report a novel multicontact radio frequency (RF) microelectromechanical system (MEMS) switch with...
Performances of the metal-to-metal contact radio frequency (RF) MEMS switches largely rely on the co...
MEMS (Micro-Electro-Mechanical Structures) switches are devices used to achieve a short or open cir...
International audienceThis paper presents the work realized on a new RF MEMS design for micro-switch...
A novel latching microelectromechanical system (MEMS) switch is reported, which uses a compact confi...
The present publication discloses a micromechanical structure including at least one active element,...
The Omni-directional impact MEMS switch was designed and characterized for the purpose of impact sen...