Hochpräzise Fügungen mittels reaktiven Nanometermultischichten: Entwicklung einer kontrollierbaren, lokalen und kurzzeitig wirkenden Wärmequelle zum Fügen von wärmeempfindlichen Bauteilen

Established joining techniques like welding, soldering or brazing typically are characterized by a large amount of heat input into the components. Especially in the case of heat sensitive structures like MEMS this often results in stress induced deformation and degradation or even in damaging the parts. Therefore, there is an urgent need for a more reliable and reproducible method for joining, which is characterized by a well defined and small heat input for only a short time period. So-called reactive nanometer multilayer systems (RMS) offer a promising approach to meet these needs. Reactive nanometer multilayers consist of several hundreds or thousands of alternating nanoscale layers, which can exothermicly react with each other. Placing a reactive nanometer multilayer coated with a solder or brazing layer between two surfaces, it can be used as a controllable local heat source for joining. The various applications in recent years have caused extensive activities regarding the production and development of reactive nanometer multilayer systems. Already in 2009 the first results were presented in the VIP [1]. The theoretical description, characterization and basic applications of the RMS were discussed. In the following article we will present the latest developments in the production, development and application of reactive nanometer multilayers for joining techniques. It will be concentrated on the production of freestanding reactive multilayer foils, their reactive design as well as their application for joining various material combinations