Höchste Präzision in kurzer Taktzeit: Hochempfindliche Dünnschicht-DMS auf industrieller Kurztaktanlage

Commonly, sputtered strain gauges are already used for highly precise pressure sensors. By using special highly sensitive piezoresistive nanocomposites consisting of metal nanoparticles embedded in an insulating matrix made from diamond-like carbon (DLC) the sensitivity to strain can be significantly increased. Essential parameters for the characterization of the thin films used as sensor layer are the strain sensitivity (described by the gauge factor) and the temperature coefficient of resistance (TCR). Conventionally used NiCr alloys have a gauge factor of approximately 2. By using metal-DLC nanocomposite films a factor 5 to 10 higher strain sensitivity in combination with a TCR close to zero was reached on laboratory scale. At first, the highly sensitive films were produced by static deposition using a box coater which led to quite long process times. By using a dynamic deposition process in the same machine the throughput of samples was slightly increased. But for using these highly sensitive films on industrial scale much higher cost and process efficiency is necessary. Hence, the process was transferred to a highrate sputtering system. A 20 times higher throughput of samples was reached in combination with a higher strain sensitivity compared to the dynamic process in the box coater. The used high-rate sputtering system is also commercially available with enlarged process chambers which enables for a further up-scaling for efficiently industrial production