Spektral abstimmbare IR-Sensoren für die industrielle Prozessmesstechnik und die medizinische Gasanalyse

Miniature infrared spectrometers have great potential, e.g. for process and environmental analytics or in medical applications. This paper reports on tunable IR sensors for the mid and long wave infrared, which are based on pyroelectric detectors and MEMS Fabry-Perot filters. Selected applications in medical gas analysis and industrial process monitoring are presented. An outlook towards a new generation of fast and high resolving FP microspectrometers is given