Nanoscale imaging using a compact laser plasma EUV source
- Wachulak, P.
- Bartnik, A.
- Fiedorowicz, H.
- Kostecki, J.
- Jarocki, R.
- Szczurek, M.
- Szczurek, A.
- Feigl, T.
- Pina, L.
DOIAbstract
High resolution imaging methods and techniques are currently under development. One of them is an extreme ultraviolet (EUV) microscopy, based on Fresnel zone plates. In this paper a compact, high-repetition, laser-plasma EUV source, emitting quasi-monochromatic radiation at 13.8nm wavelength was used in a desktop EUV transmission microscopy with a spatial (half-pitch) resolution of 50nm. EUV microscopy images of objects with various thicknesses and the spatial resolution measurements using the knife-edge test are presented
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